Wafer Parameters
Unit System:
mm
µm
Die Size X
(mm)
Die Size Y
(mm)
Scribe X
(mm)
Scribe Y
(mm)
Overlap X
(mm)
Overlap Y
(mm)
Die Array X
Die Array Y
Wafer Diameter
(mm)
Edge Clearance
(mm)
Flat Height
(mm)
Grid Offset X
(mm)
Grid Offset Y
(mm)
Reticle Layout
Enable Eccentric Layout
Show Shot Outlines
Outer Left
(mm)
Outer Right
(mm)
Outer Top
(mm)
Outer Bottom
(mm)
Utilization
MFU (Shot/26×33):
—
Wafer Area Util.:
—
Shot Size:
—
Step Size:
—
Optimization
Sweep Max Gross Die
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Parameter Guide
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Valid Gross Dies
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Ugly Dies
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Full Cells
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Partial Cells
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